{"id":3057,"date":"2026-03-20T08:25:09","date_gmt":"2026-03-20T08:25:09","guid":{"rendered":"https:\/\/www.sapphiretube.com\/?post_type=product&#038;p=3057"},"modified":"2026-03-20T08:25:09","modified_gmt":"2026-03-20T08:25:09","slug":"12-inch-sapphire-wafer-for-led-and-gan-device-manufacturing","status":"publish","type":"product","link":"https:\/\/www.sapphiretube.com\/vi\/product\/12-inch-sapphire-wafer-for-led-and-gan-device-manufacturing\/","title":{"rendered":"T\u1ea5m wafer sapphire 12 inch d\u00f9ng trong s\u1ea3n xu\u1ea5t \u0111\u00e8n LED v\u00e0 thi\u1ebft b\u1ecb GaN"},"content":{"rendered":"<h1 data-end=\"196\" data-start=\"174\"><strong>T\u1ed5ng quan v\u1ec1 s\u1ea3n ph\u1ea9m<\/strong><\/h1>\n<p data-end=\"628\" data-start=\"197\">T\u1ea5m wafer sapphire 12 inch l\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n sapphire \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u01b0\u1eddng k\u00ednh c\u1ef1c l\u1edbn, \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn. So v\u1edbi c\u00e1c t\u1ea5m wafer sapphire truy\u1ec1n th\u1ed1ng c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 2\u20136 inch, t\u1ea5m wafer sapphire 12 inch gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t, t\u1ef7 l\u1ec7 s\u1eed d\u1ee5ng v\u1eadt li\u1ec7u v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a thi\u1ebft b\u1ecb, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c c\u00f4ng ngh\u1ec7 LED th\u1ebf h\u1ec7 m\u1edbi, \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t v\u00e0 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn.<\/p>\n<p data-end=\"1012\" data-start=\"630\">C\u00e1c t\u1ea5m wafer sapphire 12 inch c\u1ee7a ch\u00fang t\u00f4i \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb c\u00e1c tinh th\u1ec3 \u0111\u01a1n Al\u2082O\u2083 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, \u0111\u01b0\u1ee3c nu\u00f4i c\u1ea5y b\u1eb1ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p nu\u00f4i c\u1ea5y tinh th\u1ec3 ti\u00ean ti\u1ebfn, sau \u0111\u00f3 tr\u1ea3i qua c\u00e1c c\u00f4ng \u0111o\u1ea1n c\u1eaft ch\u00ednh x\u00e1c, m\u00e0i ph\u1eb3ng, \u0111\u00e1nh b\u00f3ng v\u00e0 ki\u1ec3m tra ch\u1ea5t l\u01b0\u1ee3ng nghi\u00eam ng\u1eb7t. C\u00e1c t\u1ea5m wafer n\u00e0y c\u00f3 \u0111\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi, m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p c\u00f9ng \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh quang h\u1ecdc v\u00e0 c\u01a1 h\u1ecdc cao, \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u kh\u1eaft khe trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o c\u00e1c thi\u1ebft b\u1ecb di\u1ec7n t\u00edch l\u1edbn.<\/p>\n<p data-end=\"1012\" data-start=\"630\"><img decoding=\"async\" class=\"aligncenter\" src=\"https:\/\/www.maoyt.com\/photo\/sapphire-substrate\/editor\/20260205115728_63014.jpg\" alt=\"\" data-cke-saved-src=\"\/photo\/sapphire-substrate\/editor\/20260205115728_63014.jpg\" \/><\/p>\n<hr data-end=\"1017\" data-start=\"1014\" \/>\n<h1 data-end=\"1049\" data-start=\"1019\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright\" src=\"https:\/\/www.maoyt.com\/photo\/sapphire-substrate\/editor\/20260205115750_28908.jpg\" alt=\"\" width=\"324\" height=\"351\" data-cke-saved-src=\"\/photo\/sapphire-substrate\/editor\/20260205115750_28908.jpg\" \/><strong>\u0110\u1eb7c t\u00ednh v\u1eadt li\u1ec7u<\/strong><\/h1>\n<p data-end=\"1288\" data-start=\"1050\">Ng\u1ecdc b\u00edch (oxit nh\u00f4m \u0111\u01a1n tinh th\u1ec3, Al\u2082O\u2083) \u0111\u01b0\u1ee3c bi\u1ebft \u0111\u1ebfn r\u1ed9ng r\u00e3i nh\u1edd c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd v\u00e0 h\u00f3a h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i. C\u00e1c t\u1ea5m wafer ng\u1ecdc b\u00edch 12 inch kh\u00f4ng ch\u1ec9 k\u1ebf th\u1eeba to\u00e0n b\u1ed9 \u01b0u \u0111i\u1ec3m c\u1ee7a v\u1eadt li\u1ec7u ng\u1ecdc b\u00edch m\u00e0 c\u00f2n mang l\u1ea1i di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t s\u1eed d\u1ee5ng l\u1edbn h\u01a1n \u0111\u00e1ng k\u1ec3.<\/p>\n<p data-end=\"1329\" data-start=\"1290\">C\u00e1c \u0111\u1eb7c t\u00ednh ch\u00ednh c\u1ee7a v\u1eadt li\u1ec7u bao g\u1ed3m:<\/p>\n<ul data-end=\"1589\" data-start=\"1330\">\n<li data-end=\"1377\" data-start=\"1330\">\n<p data-end=\"1377\" data-start=\"1332\">\u0110\u1ed9 c\u1ee9ng v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n c\u1ef1c cao<\/p>\n<\/li>\n<li data-end=\"1432\" data-start=\"1378\">\n<p data-end=\"1432\" data-start=\"1380\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi v\u00e0 \u0111i\u1ec3m n\u00f3ng ch\u1ea3y cao<\/p>\n<\/li>\n<li data-end=\"1486\" data-start=\"1433\">\n<p data-end=\"1486\" data-start=\"1435\">Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i \u0111\u1ed1i v\u1edbi axit v\u00e0 ki\u1ec1m<\/p>\n<\/li>\n<li data-end=\"1542\" data-start=\"1487\">\n<p data-end=\"1542\" data-start=\"1489\">\u0110\u1ed9 trong su\u1ed1t quang h\u1ecdc cao trong d\u1ea3i b\u01b0\u1edbc s\u00f3ng t\u1eeb tia c\u1ef1c t\u00edm (UV) \u0111\u1ebfn h\u1ed3ng ngo\u1ea1i (IR)<\/p>\n<\/li>\n<li data-end=\"1589\" data-start=\"1543\">\n<p data-end=\"1589\" data-start=\"1545\">\u0110\u1eb7c t\u00ednh c\u00e1ch \u0111i\u1ec7n tuy\u1ec7t v\u1eddi<\/p>\n<\/li>\n<\/ul>\n<p data-end=\"1744\" data-start=\"1591\">Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y khi\u1ebfn c\u00e1c t\u1ea5m wafer sapphire 12 inch tr\u1edf n\u00ean ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng gia c\u00f4ng kh\u1eafc nghi\u1ec7t v\u00e0 c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<hr data-end=\"1749\" data-start=\"1746\" \/>\n<h1 data-end=\"1778\" data-start=\"1751\"><strong>Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/strong><\/h1>\n<p data-end=\"1942\" data-start=\"1779\">Vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c t\u1ea5m wafer sapphire 12 inch \u0111\u00f2i h\u1ecfi c\u00e1c c\u00f4ng ngh\u1ec7 ph\u00e1t tri\u1ec3n tinh th\u1ec3 ti\u00ean ti\u1ebfn v\u00e0 gia c\u00f4ng si\u00eau ch\u00ednh x\u00e1c. Quy tr\u00ecnh s\u1ea3n xu\u1ea5t ti\u00eau bi\u1ec3u bao g\u1ed3m:<\/p>\n<ol data-end=\"2718\" data-start=\"1944\">\n<li data-end=\"2166\" data-start=\"1944\">\n<p data-end=\"2166\" data-start=\"1947\"><strong data-end=\"1972\" data-start=\"1947\">Ph\u01b0\u01a1ng ph\u00e1p nu\u00f4i c\u1ea5y tinh th\u1ec3 \u0111\u01a1n<\/strong><br data-end=\"1975\" data-start=\"1972\" \/>C\u00e1c tinh th\u1ec3 sapphire c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c nu\u00f4i c\u1ea5y b\u1eb1ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ti\u00ean ti\u1ebfn nh\u01b0 KY ho\u1eb7c c\u00e1c c\u00f4ng ngh\u1ec7 nu\u00f4i c\u1ea5y tinh th\u1ec3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn kh\u00e1c, \u0111\u1ea3m b\u1ea3o h\u01b0\u1edbng tinh th\u1ec3 \u0111\u1ed3ng nh\u1ea5t v\u00e0 \u1ee9ng su\u1ea5t b\u00ean trong th\u1ea5p.<\/p>\n<\/li>\n<li data-end=\"2346\" data-start=\"2168\">\n<p data-end=\"2346\" data-start=\"2171\"><strong data-end=\"2202\" data-start=\"2171\">T\u1ea1o h\u00ecnh v\u00e0 c\u1eaft l\u00e1t pha l\u00ea<\/strong><br data-end=\"2205\" data-start=\"2202\" \/>Thanh sapphire \u0111\u01b0\u1ee3c gia c\u00f4ng ch\u00ednh x\u00e1c v\u00e0 c\u1eaft th\u00e0nh c\u00e1c t\u1ea5m wafer c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 12 inch b\u1eb1ng thi\u1ebft b\u1ecb c\u1eaft c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao nh\u1eb1m gi\u1ea3m thi\u1ec3u t\u1ed1i \u0111a t\u1ed5n th\u01b0\u01a1ng b\u00ean trong.<\/p>\n<\/li>\n<li data-end=\"2538\" data-start=\"2348\">\n<p data-end=\"2538\" data-start=\"2351\"><strong data-end=\"2376\" data-start=\"2351\">M\u00e0i nh\u00e1m v\u00e0 \u0111\u00e1nh b\u00f3ng<\/strong><br data-end=\"2379\" data-start=\"2376\" \/>C\u00e1c quy tr\u00ecnh m\u00e0i nh\u00e1m nhi\u1ec1u b\u01b0\u1edbc v\u00e0 \u0111\u00e1nh b\u00f3ng c\u01a1 h\u00f3a h\u1ecdc (CMP) \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t, \u0111\u1ed9 ph\u1eb3ng v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y tuy\u1ec7t v\u1eddi.<\/p>\n<\/li>\n<li data-end=\"2718\" data-start=\"2540\">\n<p data-end=\"2718\" data-start=\"2543\"><strong data-end=\"2570\" data-start=\"2543\">V\u1ec7 sinh v\u00e0 ki\u1ec3m tra<\/strong><br data-end=\"2573\" data-start=\"2570\" \/>M\u1ed7i t\u1ea5m wafer sapphire 12 inch \u0111\u1ec1u \u0111\u01b0\u1ee3c l\u00e0m s\u1ea1ch k\u1ef9 l\u01b0\u1ee1ng v\u00e0 ki\u1ec3m tra nghi\u00eam ng\u1eb7t, bao g\u1ed3m ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t, \u0111\u1ed9 l\u1ec7ch t\u1ed5ng th\u1ec3 (TTV), \u0111\u1ed9 cong, \u0111\u1ed9 v\u1eb9o v\u00e0 ph\u00e2n t\u00edch khuy\u1ebft t\u1eadt.<\/p>\n<\/li>\n<\/ol>\n<hr data-end=\"2723\" data-start=\"2720\" \/>\n<h1 data-end=\"2743\" data-start=\"2725\"><strong>\u1ee8ng d\u1ee5ng<\/strong><\/h1>\n<p data-end=\"2833\" data-start=\"2744\">C\u00e1c t\u1ea5m wafer sapphire 12 inch \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn v\u00e0 m\u1edbi n\u1ed5i, bao g\u1ed3m:<\/p>\n<ul data-end=\"3127\" data-start=\"2835\">\n<li data-end=\"2888\" data-start=\"2835\">\n<p data-end=\"2888\" data-start=\"2837\"><strong data-end=\"2886\" data-start=\"2837\">Ch\u1ea5t n\u1ec1n LED c\u00f4ng su\u1ea5t cao v\u00e0 \u0111\u1ed9 s\u00e1ng cao<\/strong><\/p>\n<\/li>\n<li data-end=\"2935\" data-start=\"2889\">\n<p data-end=\"2935\" data-start=\"2891\"><strong data-end=\"2933\" data-start=\"2891\">Thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t v\u00e0 thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn d\u1ef1a tr\u00ean GaN<\/strong><\/p>\n<\/li>\n<li data-end=\"3001\" data-start=\"2936\">\n<p data-end=\"3001\" data-start=\"2938\"><strong data-end=\"2999\" data-start=\"2938\">Khung ch\u1ee9a thi\u1ebft b\u1ecb b\u00e1n d\u1eabn v\u00e0 ch\u1ea5t n\u1ec1n c\u00e1ch \u0111i\u1ec7n<\/strong><\/p>\n<\/li>\n<li data-end=\"3059\" data-start=\"3002\">\n<p data-end=\"3059\" data-start=\"3004\"><strong data-end=\"3057\" data-start=\"3004\">C\u1eeda s\u1ed5 quang h\u1ecdc v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn quang h\u1ecdc di\u1ec7n t\u00edch l\u1edbn<\/strong><\/p>\n<\/li>\n<li data-end=\"3127\" data-start=\"3060\">\n<p data-end=\"3127\" data-start=\"3062\"><strong data-end=\"3127\" data-start=\"3062\">C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c ch\u1ea5t mang quy tr\u00ecnh \u0111\u1eb7c bi\u1ec7t<\/strong><\/p>\n<\/li>\n<\/ul>\n<p data-end=\"3222\" data-start=\"3129\">\u0110\u01b0\u1eddng k\u00ednh l\u1edbn gi\u00fap t\u0103ng n\u0103ng su\u1ea5t v\u00e0 n\u00e2ng cao hi\u1ec7u qu\u1ea3 chi ph\u00ed trong s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t.<\/p>\n<hr data-end=\"3227\" data-start=\"3224\" \/>\n<h1 data-end=\"3272\" data-start=\"3229\"><strong>\u01afu \u0111i\u1ec3m c\u1ee7a t\u1ea5m wafer sapphire 12 inch<\/strong><\/h1>\n<ul data-end=\"3549\" data-start=\"3273\">\n<li data-end=\"3330\" data-start=\"3273\">\n<p data-end=\"3330\" data-start=\"3275\">Di\u1ec7n t\u00edch s\u1eed d\u1ee5ng l\u1edbn h\u01a1n gi\u00fap t\u0103ng s\u1ea3n l\u01b0\u1ee3ng thi\u1ebft b\u1ecb tr\u00ean m\u1ed7i t\u1ea5m wafer<\/p>\n<\/li>\n<li data-end=\"3378\" data-start=\"3331\">\n<p data-end=\"3378\" data-start=\"3333\">N\u00e2ng cao t\u00ednh nh\u1ea5t qu\u00e1n v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a quy tr\u00ecnh<\/p>\n<\/li>\n<li data-end=\"3432\" data-start=\"3379\">\n<p data-end=\"3432\" data-start=\"3381\">Gi\u1ea3m chi ph\u00ed tr\u00ean m\u1ed7i thi\u1ebft b\u1ecb trong s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t<\/p>\n<\/li>\n<li data-end=\"3490\" data-start=\"3433\">\n<p data-end=\"3490\" data-start=\"3435\">\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i, ph\u00f9 h\u1ee3p \u0111\u1ec3 x\u1eed l\u00fd c\u00e1c v\u1eadt li\u1ec7u c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn<\/p>\n<\/li>\n<li data-end=\"3549\" data-start=\"3491\">\n<p data-end=\"3549\" data-start=\"3493\">C\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh cho c\u00e1c \u1ee9ng d\u1ee5ng kh\u00e1c nhau<\/p>\n<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"aligncenter\" src=\"https:\/\/www.maoyt.com\/photo\/sapphire-substrate\/editor\/20260205115843_17448.jpg\" alt=\"\" width=\"536\" height=\"352\" data-cke-saved-src=\"\/photo\/sapphire-substrate\/editor\/20260205115843_17448.jpg\" \/><\/p>\n<hr data-end=\"3554\" data-start=\"3551\" \/>\n<h1 data-end=\"3583\" data-start=\"3556\"><strong>C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/strong><\/h1>\n<p data-end=\"3657\" data-start=\"3584\">Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c gi\u1ea3i ph\u00e1p t\u00f9y ch\u1ec9nh linh ho\u1ea1t cho c\u00e1c t\u1ea5m wafer sapphire 12 inch, bao g\u1ed3m:<\/p>\n<ul data-end=\"3877\" data-start=\"3658\">\n<li data-end=\"3715\" data-start=\"3658\">\n<p data-end=\"3715\" data-start=\"3660\">H\u01b0\u1edbng tinh th\u1ec3 (m\u1eb7t C, m\u1eb7t A, m\u1eb7t R, v.v.)<\/p>\n<\/li>\n<li data-end=\"3752\" data-start=\"3716\">\n<p data-end=\"3752\" data-start=\"3718\">Dung sai v\u1ec1 \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u01b0\u1eddng k\u00ednh<\/p>\n<\/li>\n<li data-end=\"3793\" data-start=\"3753\">\n<p data-end=\"3793\" data-start=\"3755\">\u0110\u00e1nh b\u00f3ng m\u1ed9t m\u1eb7t ho\u1eb7c hai m\u1eb7t<\/p>\n<\/li>\n<li data-end=\"3829\" data-start=\"3794\">\n<p data-end=\"3829\" data-start=\"3796\">H\u00ecnh d\u1ea1ng c\u1ea1nh v\u00e0 thi\u1ebft k\u1ebf v\u00e1t c\u1ea1nh<\/p>\n<\/li>\n<li data-end=\"3877\" data-start=\"3830\">\n<p data-end=\"3877\" data-start=\"3832\">Y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t v\u00e0 \u0111\u1ed9 ph\u1eb3ng<\/p>\n<\/li>\n<\/ul>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"0\">\n<thead>\n<tr>\n<th>Tham s\u1ed1<\/th>\n<th>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<th>Ghi ch\u00fa<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u0110\u01b0\u1eddng k\u00ednh t\u1ea5m wafer<\/td>\n<td>12 inch (300 mm)<\/td>\n<td>T\u1ea5m wafer ti\u00eau chu\u1ea9n c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn<\/td>\n<\/tr>\n<tr>\n<td>Ch\u1ea5t li\u1ec7u<\/td>\n<td>Ng\u1ecdc b\u00edch \u0111\u01a1n tinh th\u1ec3 (Al\u2082O\u2083)<\/td>\n<td>\u0110\u1ed9 tinh khi\u1ebft cao, lo\u1ea1i d\u00f9ng trong \u0111i\u1ec7n t\u1eed\/quang h\u1ecdc<\/td>\n<\/tr>\n<tr>\n<td>H\u01b0\u1edbng tinh th\u1ec3<\/td>\n<td>M\u1eb7t ph\u1eb3ng C (0001), m\u1eb7t ph\u1eb3ng A (11-20), m\u1eb7t ph\u1eb3ng R (1-102)<\/td>\n<td>C\u00f3 c\u00e1c bu\u1ed5i h\u01b0\u1edbng d\u1eabn t\u00f9y ch\u1ecdn<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 d\u00e0y<\/td>\n<td>430\u2013500 \u03bcm<\/td>\n<td>C\u00f3 th\u1ec3 cung c\u1ea5p \u0111\u1ed9 d\u00e0y theo y\u00eau c\u1ea7u<\/td>\n<\/tr>\n<tr>\n<td>Dung sai \u0111\u1ed9 d\u00e0y<\/td>\n<td>\u00b110 \u03bcm<\/td>\n<td>Dung sai ch\u1eb7t ch\u1ebd \u0111\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 dao \u0111\u1ed9ng \u0111\u1ed9 d\u00e0y t\u1ed5ng th\u1ec3 (TTV)<\/td>\n<td>\u226410 \u03bcm<\/td>\n<td>\u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh x\u1eed l\u00fd \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer<\/td>\n<\/tr>\n<tr>\n<td>Cung<\/td>\n<td>\u226450 \u03bcm<\/td>\n<td>\u0110o tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer<\/td>\n<\/tr>\n<tr>\n<td>Warp<\/td>\n<td>\u226450 \u03bcm<\/td>\n<td>\u0110o tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer<\/td>\n<\/tr>\n<tr>\n<td>B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/td>\n<td>M\u00e0i m\u1ed9t m\u1eb7t (SSP) \/ M\u00e0i hai m\u1eb7t (DSP)<\/td>\n<td>B\u1ec1 m\u1eb7t c\u00f3 ch\u1ea5t l\u01b0\u1ee3ng quang h\u1ecdc cao<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n<td>\u22640,5 nm (\u0111\u00e3 \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng)<\/td>\n<td>\u0110\u1ed9 m\u1ecbn \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7<\/td>\n<\/tr>\n<tr>\n<td>H\u00ecnh d\u1ea1ng c\u1ea1nh<\/td>\n<td>V\u00e1t c\u1ea1nh \/ C\u1ea1nh bo tr\u00f2n<\/td>\n<td>\u0110\u1ec3 tr\u00e1nh b\u1ecb s\u1ee9t m\u1ebb trong qu\u00e1 tr\u00ecnh v\u1eadn chuy\u1ec3n<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh h\u01b0\u1edbng<\/td>\n<td>\u00b10,5\u00b0<\/td>\n<td>\u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp epitactic di\u1ec5n ra \u0111\u00fang c\u00e1ch<\/td>\n<\/tr>\n<tr>\n<td>M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt<\/td>\n<td>&lt;10 cm\u207b\u00b2<\/td>\n<td>\u0110\u01b0\u1ee3c \u0111o b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra quang h\u1ecdc<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 ph\u1eb3ng<\/td>\n<td>\u22642 \u03bcm \/ 100 mm<\/td>\n<td>\u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh in th\u1ea1ch b\u1ea3n v\u00e0 s\u1ef1 ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxial di\u1ec5n ra \u0111\u1ed3ng \u0111\u1ec1u<\/td>\n<\/tr>\n<tr>\n<td>S\u1ef1 s\u1ea1ch s\u1ebd<\/td>\n<td>Lo\u1ea1i 100 \u2013 Lo\u1ea1i 1000<\/td>\n<td>T\u01b0\u01a1ng th\u00edch v\u1edbi ph\u00f2ng s\u1ea1ch<\/td>\n<\/tr>\n<tr>\n<td>Truy\u1ec1n d\u1eabn quang<\/td>\n<td>&gt;85% (UV\u2013IR)<\/td>\n<td>T\u00f9y thu\u1ed9c v\u00e0o b\u01b0\u1edbc s\u00f3ng v\u00e0 \u0111\u1ed9 d\u00e0y<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h1 data-end=\"119\" data-start=\"89\"><strong>C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p v\u1ec1 t\u1ea5m wafer sapphire 12 inch<\/strong><\/h1>\n<p data-end=\"324\" data-start=\"121\"><strong data-end=\"188\" data-start=\"121\">C\u00e2u h\u1ecfi 1: \u0110\u1ed9 d\u00e0y ti\u00eau chu\u1ea9n c\u1ee7a m\u1ed9t t\u1ea5m wafer sapphire 12 inch l\u00e0 bao nhi\u00eau?<\/strong><br data-end=\"191\" data-start=\"188\" \/>A: \u0110\u1ed9 d\u00e0y ti\u00eau chu\u1ea9n dao \u0111\u1ed9ng t\u1eeb 430 \u03bcm \u0111\u1ebfn 500 \u03bcm. Ch\u00fang t\u00f4i c\u0169ng c\u00f3 th\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c s\u1ea3n ph\u1ea9m c\u00f3 \u0111\u1ed9 d\u00e0y theo y\u00eau c\u1ea7u c\u1ee5 th\u1ec3 c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>\n<p data-end=\"561\" data-start=\"326\"><strong data-end=\"402\" data-start=\"326\">C\u00e2u h\u1ecfi 2: C\u00e1c h\u01b0\u1edbng tinh th\u1ec3 n\u00e0o c\u00f3 s\u1eb5n cho c\u00e1c t\u1ea5m wafer sapphire 12 inch?<\/strong><br data-end=\"405\" data-start=\"402\" \/>A: Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c h\u01b0\u1edbng C-plane (0001), A-plane (11-20) v\u00e0 R-plane (1-102). C\u00e1c h\u01b0\u1edbng kh\u00e1c c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh theo y\u00eau c\u1ea7u c\u1ee5 th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n<p data-end=\"781\" data-start=\"563\"><strong data-end=\"628\" data-start=\"563\">C\u00e2u h\u1ecfi 3: \u0110\u1ed9 ch\u00eanh l\u1ec7ch \u0111\u1ed9 d\u00e0y t\u1ed5ng th\u1ec3 (TTV) c\u1ee7a t\u1ea5m wafer l\u00e0 bao nhi\u00eau?<\/strong><br data-end=\"631\" data-start=\"628\" \/>A: C\u00e1c t\u1ea5m wafer sapphire 12 inch c\u1ee7a ch\u00fang t\u00f4i th\u01b0\u1eddng c\u00f3 \u0111\u1ed9 l\u1ec7ch t\u1ed5ng th\u1ec3 (TTV) \u226410 \u03bcm, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean to\u00e0n b\u1ed9 b\u1ec1 m\u1eb7t t\u1ea5m wafer, t\u1eeb \u0111\u00f3 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng cao trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb.<\/p>","protected":false},"excerpt":{"rendered":"<p>T\u1ea5m wafer sapphire 12 inch l\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n sapphire \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u01b0\u1eddng k\u00ednh c\u1ef1c l\u1edbn, \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn. So v\u1edbi c\u00e1c t\u1ea5m wafer sapphire truy\u1ec1n th\u1ed1ng c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 2\u20136 inch, t\u1ea5m wafer sapphire 12 inch gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t, t\u1ef7 l\u1ec7 s\u1eed d\u1ee5ng v\u1eadt li\u1ec7u v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a thi\u1ebft b\u1ecb, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c c\u00f4ng ngh\u1ec7 LED th\u1ebf h\u1ec7 m\u1edbi, \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t v\u00e0 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn.<\/p>","protected":false},"featured_media":3060,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[58],"product_tag":[],"class_list":["post-3057","product","type-product","status-publish","has-post-thumbnail","product_cat-sapphire-wafer","desktop-align-left","tablet-align-left","mobile-align-left","ast-product-gallery-layout-horizontal-slider","ast-product-tabs-layout-horizontal","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/product\/3057","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/comments?post=3057"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/media\/3060"}],"wp:attachment":[{"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/media?parent=3057"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/product_brand?post=3057"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/product_cat?post=3057"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.sapphiretube.com\/vi\/wp-json\/wp\/v2\/product_tag?post=3057"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}